Characterization of Polymer Thin Films with Small-Angle X-ray Scattering under Grazing Incidence (GISAXS)
نویسندگان
چکیده
Polymer thin films have numerous technical applications as functional coatings, the most prominent example being PMMA coatings for lithography of integrated circuits and micromechanical devices. Polymer blends and block copolymers can be tailored for specific mechanical, optical, electric, and chemical properties. For instance, functional surfaces have been created by means of polymer blend and diblock copolymer films which may serve as templates for nanolithography [1] or as antireflection coatings [2]. In the rapidly developing field of molecular electronics, opto-electronical properties of polymer films have been exploited and first devices have appeared on the market [3].
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